Use of coincidence techniques to improve the detection limits of electron spectroscopy in STEM.

A method of improving the detection limits of microanalysis using electron energy losses due to inner-shell excitation is proposed. This is based on coincidence detection of the energy-loss electrons with another signal which also results from inner-shell excitations, i.e., Auger electrons or characteristic X-rays. It is concluded that there will be a significant improvement in the detection of monolayers on a homogeneous monatomic substrate by using coincidence of energy-loss electrons with Auger electrons.