使用场发射枪扫描电子显微镜的高分辨率电子背散射衍射

High resolution electron backscatter diffraction with a field emission gun scanning electron microscope.

作者信息

Humphreys F J, Brough I

机构信息

Manchester Materials Science Centre, Grosvenor Street, Manchester M1 7HS, U.K.

出版信息

J Microsc. 1999 Jul;195(Pt 1):6-9.

PMID:10444296

Abstract

A scanning electron microscope with a thermal field emission gun (FEGSEM) is found to offer significant improvements in electron backscatter diffraction performance over a conventional W-filament scanning microscope. The spatial resolution is improved by a factor of approximately 3 in the FEGSEM and is optimized at probe currents of 50-300 nA and at 10-15 keV. The angular accuracy is optimized at probe currents above approximately 150 nA and at 30 keV.

摘要

人们发现，与传统的钨丝扫描显微镜相比，带有热场发射枪的扫描电子显微镜（FEGSEM）在电子背散射衍射性能方面有显著提升。在FEGSEM中，空间分辨率提高了约3倍，并在50 - 300 nA的探针电流以及10 - 15 keV的条件下得到优化。角精度在高于约150 nA的探针电流以及30 keV的条件下得到优化。