National High Magnetic Field Laboratory, Florida State University, Tallahassee, FL 32310, USA.
Microsc Microanal. 2013 Apr;19(2):487-95. doi: 10.1017/S1431927612014298. Epub 2013 Mar 5.
We report the installation and performance evaluation of a probe aberration-corrected high-resolution JEOL JEM-ARM200F transmission electron microscope (TEM). We provide details on construction of the room that enables us to obtain scanning transmission electron microscope (STEM) data without any evident distortions/noise from the external environment. The microscope routinely delivers expected performance. We show that the highest STEM spatial resolution and energy resolution achieved with this microscope are 0.078 nm and 0.34 eV, respectively. We report a direct comparative evaluation of the performance of this microscope with a Schottky thermal field-emission gun versus a cold field-emission gun. Cold field-emission illumination improves spatial resolution of the high current probe for analytical spectroscopy, the TEM information limit, and the electron energy resolution compared to the Schottky thermal field-emission source.
我们报告了一台经过像差校正的、分辨率高的 JEM-ARM200F 型日本电子株式会社透射电子显微镜（TEM）的安装和性能评估。我们提供了有关构建房间的详细信息，使我们能够获得没有外部环境明显干扰/噪声的扫描透射电子显微镜（STEM）数据。该显微镜的性能符合预期。我们展示了该显微镜所能达到的最高 STEM 空间分辨率和能量分辨率分别为 0.078nm 和 0.34eV。我们报告了对该显微镜与肖特基热场发射枪和冷场发射枪性能的直接比较评估。与肖特基热场发射源相比，冷场发射照明提高了分析光谱学的高电流探针的空间分辨率、TEM 信息极限和电子能量分辨率。
