Humphreys FJ
Manchester Materials Science Centre, Grosvenor Street, Manchester M1 7HS, U.K.
J Microsc. 1999 Sep;195(3):170-185. doi: 10.1046/j.1365-2818.1999.00578.x.
Although electron backscattered diffraction (EBSD) in the scanning electron microscope is used mainly to investigate the relationship between local textures and microstructures, the technique has now developed to the stage where it requires serious consideration as a tool for routine quantitative characterization of microstructures. This paper examines the application of EBSD to the characterization of phase distributions, grain and subgrain structures and also textures. Comparisons are made with the standard methods of quantitative metallography and it is shown that in many cases EBSD can produce more accurate and detailed measurements than the standard methods and that the data may sometimes be obtained more rapidly. The factors which currently limit the use of EBSD for quantitative microstructural characterization, including the speed of data acquisition and the angular and spatial resolutions, are discussed, and future developments are considered.
虽然扫描电子显微镜中的电子背散射衍射（EBSD）主要用于研究局部织构与微观结构之间的关系，但该技术现已发展到需要作为微观结构常规定量表征工具予以认真考虑的阶段。本文探讨了EBSD在相分布、晶粒和亚晶粒结构以及织构表征方面的应用。与定量金相学的标准方法进行了比较，结果表明在许多情况下，EBSD能够比标准方法产生更准确、更详细的测量结果，并且有时可以更快地获取数据。讨论了目前限制EBSD用于定量微观结构表征的因素，包括数据采集速度以及角度和空间分辨率，并对未来的发展进行了展望。
