Herrmann F, Weihnacht M, Buttgenbach S
Department K8/STZ1, Robert Bosch GmbH, Reutlingen, Germany.
Ultrasonics. 1999 Jun;37(5):335-41. doi: 10.1016/s0041-624x(99)00012-8.
Acoustic wave devices based on waveguide modes with shear-horizontal polarisation in Y-rotated quartz plates are very promising for sensor application. Up to now, several systems have been reported based on standard ST-quartz. Those devices lack temperature stability, which is essential for field application. However, appropriate combinations of crystal cut angle and SiO2 overlay thickness should provide temperature compensation. Thus, different systems based on Y-rotated quartz plates with cut angles between 30 and 42.75 degrees have been investigated. First- and second-order temperature coefficients of frequency change have been calculated and measured. Moreover, properties are compiled that are relevant for the device design, i.e. acoustoelectric coupling coefficients, effective dielectric constants, and phase as well as group velocities. In summary, device configurations could be identified that combine temperature stability comparable to that of surface skimming bulk waves in the AT-cut, a suitable coupling coefficient, and high gravimetric sensitivity.
基于Y旋转石英板中具有水平切变极化的波导模式的声波器件在传感器应用方面非常有前景。到目前为止，已经报道了几种基于标准ST石英的系统。这些器件缺乏温度稳定性，而温度稳定性对于现场应用至关重要。然而，晶体切割角度和SiO2覆盖层厚度的适当组合应该能够提供温度补偿。因此，已经研究了基于切割角度在30度至42.75度之间的Y旋转石英板的不同系统。已经计算并测量了频率变化的一阶和二阶温度系数。此外，还汇编了与器件设计相关的特性，即声电耦合系数、有效介电常数以及相速度和群速度。总之，可以确定这样的器件配置，其结合了与AT切割中的表面掠射体波相当的温度稳定性、合适的耦合系数和高重量灵敏度。
