Kehoe L, Coyle G, Murray S, Flannery CM, Crean GM
National Microelectronics Research Centre, Lee Maltings, Cork, Ireland.
Ultrasonics. 2000 Mar;38(1-8):508-12. doi: 10.1016/s0041-624x(99)00164-x.
In this paper, the surface acoustic wave velocity results acquired from the inspection of specially manufactured and characterised alumina ceramic materials are presented. Ultrasonic velocity data of alumina-based ceramics in the range 60-100% theoretical density was generated utilising non-contacting laser-ultrasonic measurements based on laser generation and detection of surface acoustic waves with the objective of creating a routine technique for industrial advanced alumina inspection. With linear fitting the surface acoustic wave velocity data serves as a calibration graph for using laser ultrasonics for routine monitoring of alumina. A second laser ultrasonic technique based on the laser generation and foil transducer detection of surface acoustic waves was used to validate the surface acoustic wave velocities measured by the laser generation/detection technique.
本文展示了通过对特殊制造和表征的氧化铝陶瓷材料进行检测所获得的表面声波速度结果。利用基于激光产生和表面声波检测的非接触式激光超声测量方法，生成了理论密度在60%-100%范围内的氧化铝基陶瓷的超声速度数据，目的是创建一种用于工业先进氧化铝检测的常规技术。通过线性拟合，表面声波速度数据可作为使用激光超声对氧化铝进行常规监测的校准图。基于激光产生和箔式换能器对表面声波检测的第二种激光超声技术，用于验证通过激光产生/检测技术测量的表面声波速度。
