Oho E, Watanabe M
Department of Electrical Engineering, Kogakuin University, Hachioji, Tokyo, Japan.
Scanning. 2001 Jan-Feb;23(1):24-31. doi: 10.1002/sca.4950230104.
The principles of image formation in natural color scanning electron microscopy (NC-SEM) are discussed in detail. This method is based on the frequency characteristic of the human visual system. It is shown that the Mach effect and masking effect are important in the characteristics. The former, which can enhance structural details, is visually similar to the edge effect in secondary electron (SE) images, and the latter is required for proper representation of very degraded color information obtained from a light microscope. When using these effects suitably, an NC-SEM image with the resolution equivalent to that of an SEM image can be acquired, though it is composed of an SEM image and a special video microscopy (VM) image with a resolution much lower than the SEM image of the identical view. The NC-SEM is more effective than the SEM in observation. interpretation, and analysis of various samples with important color information.
详细讨论了自然彩色扫描电子显微镜(NC-SEM)中的图像形成原理。该方法基于人类视觉系统的频率特性。结果表明,马赫效应和掩蔽效应在这些特性中很重要。前者可以增强结构细节,在视觉上类似于二次电子(SE)图像中的边缘效应,而后者对于正确表示从光学显微镜获得的严重退化的颜色信息是必需的。当适当地利用这些效应时,尽管NC-SEM图像由SEM图像和分辨率远低于同一视图的SEM图像的特殊视频显微镜(VM)图像组成,但仍可以获得分辨率与SEM图像相当的NC-SEM图像。在观察、解释和分析具有重要颜色信息的各种样品时,NC-SEM比SEM更有效。