Theory and design of piezoelectric resonators immune to acceleration: present state of the art.

A typical low noise oscillator uses a crystal resonator as the frequency-determining element. An understanding of the fundamental nature of acceleration sensitivity in crystal oscillators resides primarily in understanding the behavior of the crystal resonator. The driving factor behind the acceleration-induced frequency shift is shown to be deformation of the resonator. The deformation drives two effects: an essentially linear change in the frequency-determining dimensions of the resonator and an essentially nonlinear effect of changing the velocity of the propagating wave. In this paper, the fundamental nature of acceleration sensitivity is reviewed and clarified, and attendant design guidance is developed for piezoelectric resonators. The basic properties of acceleration sensitivity and general design guidance are developed through the simple examples of "bulk acoustic wave (BAW) in a box" and "surface transverse wave (STW) in a box." These examples serve to clarify a number of concepts, including the role of mode shape and the basic difference between the BAW and STW cases. The design equations clarify the functional dependencies of the acceleration sensitivities on the full range of crystal resonator design and fabrication parameters.