Duparré Angela, Ferre-Borrull Josep, Gliech Stefan, Notni Gunther, Steinert Jörg, Bennett Jean M
Optical Systems Department, Fraunhofer Institute for Applied Optics and Precision Engineering, Jena, Germany.
Appl Opt. 2002 Jan 1;41(1):154-71. doi: 10.1364/ao.41.000154.
Surface topography and light scattering were measured on 15 samples ranging from those having smooth surfaces to others with ground surfaces. The measurement techniques included an atomic force microscope, mechanical and optical profilers, confocal laser scanning microscope, angle-resolved scattering, and total scattering. The samples included polished and ground fused silica, silicon carbide, sapphire, electroplated gold, and diamond-turned brass. The measurement instruments and techniques had different surface spatial wavelength band limits, so the measured roughnesses were not directly comparable. Two-dimensional power spectral density (PSD) functions were calculated from the digitized measurement data, and we obtained rms roughnesses by integrating areas under the PSD curves between fixed upper and lower band limits. In this way, roughnesses measured with different instruments and techniques could be directly compared. Although smaller differences between measurement techniques remained in the calculated roughnesses, these could be explained mostly by surface topographical features such as isolated particles that affected the instruments in different ways.
对15个样品进行了表面形貌和光散射测量，这些样品的表面从光滑到粗糙不等。测量技术包括原子力显微镜、机械和光学轮廓仪、共聚焦激光扫描显微镜、角分辨散射和总散射。样品包括抛光和研磨的熔融石英、碳化硅、蓝宝石、电镀金和金刚石车削黄铜。测量仪器和技术具有不同的表面空间波长带宽限制，因此测得的粗糙度不能直接比较。从数字化测量数据中计算出二维功率谱密度（PSD）函数，并通过对PSD曲线在固定的上下带宽限制之间的面积进行积分来获得均方根粗糙度。通过这种方式，可以直接比较用不同仪器和技术测得的粗糙度。尽管在计算出的粗糙度中测量技术之间仍存在较小差异，但这些差异大多可以通过表面形貌特征来解释，例如孤立颗粒以不同方式影响仪器。
