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Topical meeting on optical interference coatings (OIC'2001): manufacturing problem.

作者信息

Dobrowolski J A, Browning Stephen, Jacobson Michael, Nadal Maria

机构信息

Institute for Microstructural Sciences, National Research Council of Canada, Ottawa, Ontario.

出版信息

Appl Opt. 2002 Jun 1;41(16):3039-52. doi: 10.1364/ao.41.003039.

Abstract

Measurements are presented of the experimental filters submitted to the first optical thin-film manufacturing problem posed in conjunction with the Topical Meeting on Optical Interference Coatings, in which the object was to produce multilayers with spectral transmittance and reflectance curves that were as close as possible to the target values that were specified in the 400- to 600-nm spectral region. No limit was set on the overall thickness of the solutions or the number of layers used in their construction. The participants were free to use the coating materials of their choice. Six different groups submitted a total of 11 different filters for evaluation. Three different physical vapor deposition processes were used for the manufacture of the coatings: magnetron sputtering, ion-beam sputtering, and plasma-ion-assisted, electron-beam gun evaporation. The solutions ranged in metric thickness from 758 to 4226 nm and consisted of between 8 and 27 layers. For all but two of the samples submitted, the average rms departure of the measured transmittances and reflectances from the target values in the spectral region of interest was between 0.98% and 1.55%.

摘要

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