Spectral polarization measurements by use of the grating division-of-amplitude photopolarimeter.

The grating division-of-amplitude photopolarimeter (G-DOAP) is an instrument that exploits the multiple-beam-splitting, polarizing, and dispersive properties of diffraction gratings for the time-resolved measurement of the complete state of polarization of collimated broadband incident light, as represented by the four Stokes parameters as a function of wavelength across the spectrum. It is a compact, high-speed sensor that has no moving parts and is simple to install and operate. These characteristics make the G-DOAP well suited for in situ spectroscopic ellipsometry (SE) applications for monitoring and controlling thin-film processes. The design and performance of a prototype instrument are presented. Precise SE measurements, to +/-0.04 degrees in psi and +/-0.1 degrees in delta, are demonstrated in the 550-940-nm wavelength range.