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Digital CMOS sensor chips for media-isolated liquid flow sensing.

作者信息

Kanne U

机构信息

Sensirion AG, Zurich, Switzerland.

出版信息

Med Device Technol. 2003 May;14(4):16-8.

Abstract

New digital sensor technology that comes from semiconductor engineering enables media-isolated and extremely precise measurement of small mass flows in medical devices. The capabilities and potential of this technology are described.

摘要

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