Ostrikov K, Denysenko I B, Vladimirov S V, Xu S, Sugai H, Yu M Y
Plasma Sources and Applications Center, NIE, Nanyang Technological University, 1 Nanyang Walk, 637616, Singapore.
Phys Rev E Stat Nonlin Soft Matter Phys. 2003 May;67(5 Pt 2):056408. doi: 10.1103/PhysRevE.67.056408. Epub 2003 May 27.
A self-consistent fluid theory of complex electronegative colloidal plasmas in parallel-plate low-pressure discharge is presented. The self-organized low-pressure diffusion equilibrium is maintained through sources and sinks of electrons, positive and negative ions, in plasmas containing dust grains. It is shown that the colloidal dust grain subsystem strongly affects the stationary state of the discharge by dynamically modifying the electron temperature and particle creation and loss processes. The model accounts for ionization, ambipolar diffusion, electron and ion collection by the dusts, electron attachment, positive-ion-negative-ion recombination, and relevant elastic and inelastic collisions. The spatial profiles of electron and positive-ion-negative-ion number densities, electron temperature, and dust charge in electronegative SiH4 discharges are obtained for different grain size, input power, neutral gas pressure, and rates of negative-ion creation and loss.
提出了一种关于平行板低压放电中复杂电负性胶体等离子体的自洽流体理论。在含有尘埃颗粒的等离子体中，通过电子、正离子和负离子的源和汇来维持自组织的低压扩散平衡。结果表明，胶体尘埃颗粒子系统通过动态改变电子温度以及粒子产生和损失过程，强烈影响放电的稳态。该模型考虑了电离、双极扩散、尘埃对电子和离子的收集、电子附着、正离子-负离子复合以及相关的弹性和非弹性碰撞。针对不同的颗粒尺寸、输入功率、中性气体压力以及负离子产生和损失速率，获得了电负性SiH4放电中电子、正离子-负离子数密度、电子温度和尘埃电荷的空间分布。
