Porter Timothy L, Eastman Michael P, Macomber Clay, Delinger William G, Zhine Rosalie
Department of Physics, Northern Arizona University, Box 6010, Flagstaff, AZ 86011, USA.
Ultramicroscopy. 2003 Oct-Nov;97(1-4):365-9. doi: 10.1016/S0304-3991(03)00062-7.
We have developed a new type of chemical microsensor based on piezoresistive microcantilever technology. In this embedded polymer microsensor, a piezoresistive microcantilever is partially "embedded" into a polymeric material. Swelling of the polymer upon analyte exposure is measured as a simple resistance change in the embedded cantilever. Arrays of these sensors, each employing a different polymeric material, provide for the identification of a wide range of chemical vapor analytes. Advantages of this system over previous "surface" piezoresistive microcantilever chemical sensors include enhanced mechanical simplicity (no mechanical approach necessary), greater resistance to shock or movement, and lower cost.
我们基于压阻式微悬臂梁技术开发了一种新型化学微传感器。在这种嵌入式聚合物微传感器中，一个压阻式微悬臂梁部分地“嵌入”到一种聚合材料中。当分析物暴露时聚合物的膨胀被测量为嵌入式悬臂梁中简单的电阻变化。这些传感器阵列，每个都采用不同的聚合材料，可用于识别多种化学蒸汽分析物。该系统相对于以前的“表面”压阻式微悬臂梁化学传感器的优点包括机械结构更简单（无需机械方法）、更强的抗冲击或抗移动能力以及更低的成本。
