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利用双计算机生成全息图对非球面进行绝对干涉测量测试。

Absolute interferometric test of aspheres by use of twin computer-generated holograms.

作者信息

Reichelt Stephan, Pruss Christof, Tiziani Hans J

机构信息

Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany.

出版信息

Appl Opt. 2003 Aug 1;42(22):4468-79. doi: 10.1364/ao.42.004468.

DOI:10.1364/ao.42.004468
PMID:12916611
Abstract

A complete absolute interferometric test of axially symmetric aspheres is presented. The method is based on a specially designed computer-generated hologram (CGH) that reconstructs an aspherical wave as well as a spherical auxiliary wave. Since both phase functions have the same symmetry and their pattern is simultaneously encoded, we call this type of multiplex hologram a Twin-CGH. The spherical wave is used for calibration. The aberrations of the spherical auxiliary wave are measured absolutely with either a spherical mirror or an absolute test for Fresnel zone plates. Thus the two types of aberration inherent in the CGH can be identified and separated from each other. The errors of the spherical wave can be transferred to those of the aspherical wave. Two different methods thatuse Twin-CGHs for absolute testing of aspheric surfaces are described. Test procedures are explained, equations are derived, and experimental results are presented. A mutual comparison of the two results and a comparison with the established N-position rotation test are given.

摘要

本文介绍了一种对轴对称非球面进行完整绝对干涉测量的方法。该方法基于一种特殊设计的计算全息图(CGH),它能重建非球面波和球面辅助波。由于这两个相位函数具有相同的对称性且其图案同时被编码,我们将这种类型的复用全息图称为双计算全息图(Twin-CGH)。球面波用于校准。球面辅助波的像差通过球面镜或菲涅耳波带片的绝对测试进行绝对测量。因此,可以识别并分离CGH中固有的两种像差类型。球面波的误差可以传递到非球面波的误差上。描述了两种使用双计算全息图对非球面表面进行绝对测试的不同方法。解释了测试程序,推导了公式,并给出了实验结果。给出了两种结果的相互比较以及与既定的N位置旋转测试的比较。

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