Liu Z P, Wang P N, Yang W D, Zheng J B, Li F M
State Key Joint Lab for Materials Modification by Triple Beams, Department of Physics, Fudan University, Shanghai 200433, China.
Guang Pu Xue Yu Guang Pu Fen Xi. 2001 Oct;21(5):637-40.
The emission spectra from the pulsed discharge plasma of nitrogen, ammonia or their mixture were measured. In the discharge of pure nitrogen gas, as the pressure increased, the discharge volume decreased and more dissociation of nitrogen molecules occurred due to the higher energy density. In the discharge of ammonia, N,N+ and NH+ were observed, but no NH2 and NH3 were detected, indicating that ammonia, which has the lower dissociation and ionization energies as compared to nitrogen, was highly dissociated. The discharge of the mixture of N2 and NH3 was also studied. The dependence of the dissociation of nitrogen on the ratio of nitrogen to ammonia was investigated by emission spectra. The optimal ratio for nitrogen dissociation was obtained. The advantage of using the mixture of nitrogen and ammonia in the synthesis of nitrides was discussed.
测量了氮气、氨气或其混合物的脉冲放电等离子体的发射光谱。在纯氮气放电中,随着压力增加,放电体积减小,由于能量密度较高,氮分子发生更多解离。在氨气放电中,观察到了N、N⁺和NH⁺,但未检测到NH₂和NH₃,这表明与氮气相比解离和电离能较低的氨气发生了高度解离。还研究了N₂和NH₃混合物的放电。通过发射光谱研究了氮解离对氮气与氨气比例的依赖性。获得了氮解离的最佳比例。讨论了在氮化物合成中使用氮气和氨气混合物的优势。