Li Z, Wang S, Wang Q, Li F
State Key Laboratory of Applied Optics, Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Science, 130022 Changchun.
Guang Pu Xue Yu Guang Pu Fen Xi. 2000 Aug;20(4):589-91.
The importance of driving mirror smoothly used in Fourier transform spectrometer (FTS) is discussed. We have designed and used high precision pneumatic hydraulic servo system to move "cat-eyes" optical system in FTS. The light source spectrum of ZYGO interferometer is measured by use of this system.