[激光烧蚀金属过程中激光诱导等离子体气体击穿的光谱分析]

[Spectro-analysis of gas breakdown in laser-induced plasma during laser ablating metal].

作者信息

Zhang Y, Song Y

机构信息

Department of Physics, Shandong Normal University, 250014 Jinan.

出版信息

Guang Pu Xue Yu Guang Pu Fen Xi. 2000 Feb;20(1):25-7.

PMID:12953443

Abstract

We obtained laser-induced plasma by laser ablating aluminium with an Nd:YAG laser, using time- and space-resolved spectroscopy, the effects of ambient gas breakdown on the emission characteristics of laser-induced plasma were studied. Argon, air, nitrogen were used as surrounding atmospheres. The experimental results showed that at the early stage of the plasma, there were many Ar+ lines in the plasma produced in argon; O+, N+ in the plasma produced in air; and N+ in the plasma produced in N2. Based on the time- and space-resolved emission spectra of the plasma at different laser beam energy, gas breakdown phenomena were analyzed when the aluminium was ablazed by laser. The effects of gas breakdown were briefly discussed.

摘要

我们用Nd:YAG激光烧蚀铝靶获得激光诱导等离子体，采用时间分辨和空间分辨光谱技术，研究了环境气体击穿对激光诱导等离子体发射特性的影响。分别以氩气、空气、氮气作为周围环境气体。实验结果表明，在等离子体形成初期，氩气环境中产生的等离子体有许多Ar+谱线；空气中产生的等离子体有O+、N+谱线；氮气环境中产生的等离子体有N+谱线。基于不同激光能量下等离子体的时间分辨和空间分辨发射光谱，分析了激光烧蚀铝靶时的气体击穿现象，并简要讨论了气体击穿的影响。