Li Zhanping, Hirokawa Kichinosuke
ULVAC-PHI Inc., 370 Enzo, Chigasaki 253-0084, Japan.
Anal Sci. 2003 Sep;19(9):1231-8. doi: 10.2116/analsci.19.1231.
The appearance regularity of the Ga+ primary ion ToF-SIMS fragment pattern of metals and inorganic compounds is discussed. For inorganic compounds formulated like M-A, where the valence of the cation M is +n, that of the anion A is -p; also, the chemical composition of the ToF-SIMS fragment is MxAy, the rule nx > or = (py + 1) is satisfied for positive ion fragments and nx < or = (py + 1) for negative ones. For example, for an oxide fragment of chemical composition MxOy (valence of M is +n), the chemical composition of the fragment appears obeying the rule nx > or = (2y + 1) for positive ions and nx < or = (2y + 1) for negative ones, respectively. The regularity of ToF-SIMS fragment patterns of sulfides, nitrates, sulfates etc. is discussed. Further, when the Ga+ primary ion ToF-SIMS fragment patterns of metals are observed, it can be inferred that the overlapped particle emission occurs from metal surfaces through alloying and/or clustering of Ga with metal on surfaces.
讨论了Ga+ 初级离子飞行时间二次离子质谱（ToF-SIMS）中金属和无机化合物碎片模式的出现规律。对于化学式为M-A的无机化合物，其中阳离子M的化合价为 +n，阴离子A的化合价为 -p；此外，ToF-SIMS碎片的化学组成为MxAy，对于正离子碎片满足nx ≥ (py + 1)规则，对于负离子碎片满足nx ≤ (py + 1)规则。例如，对于化学式为MxOy（M的化合价为 +n）的氧化物碎片，正离子碎片的化学组成出现时遵循nx ≥ (2y + 1)规则，负离子碎片的化学组成出现时遵循nx ≤ (2y + 1)规则。讨论了硫化物、硝酸盐、硫酸盐等的ToF-SIMS碎片模式规律。此外，当观察金属的Ga+ 初级离子ToF-SIMS碎片模式时，可以推断出通过Ga与表面金属的合金化和/或聚集，在金属表面发生了重叠粒子发射。
