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利用相移激光干涉测量法测量光纤端面轮廓。

Measurement of a fiber-end surface profile by use of phase-shifting laser interferometry.

作者信息

Wang Shihua, Quan Chenggen, Tay Cho Jui, Reading Ivan, Fang Zhongping

机构信息

Department of Mechanical Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260.

出版信息

Appl Opt. 2004 Jan 1;43(1):49-56. doi: 10.1364/ao.43.000049.

Abstract

We describe a laser interferometric system in which two objectives are used to measure surface profile on a connectorized fiber-end surface. By the use of the proposed illumination design a He-Ne laser as a point light source is transformed to an extended light source, which is beneficial to localize interference fringe pattern near the test surface. To obtain an optimal contrast of the interference fringe pattern, the flat mirror with an adjustable reflection ratio is used to suit different test surfaces. A piezoelectric transducer attached on the reference mirror can move precisely along the optical axis of the objective and permits implementation of four-step phase-shifting interferometry without changing the relative position between the CCD sensor and the test surface. Therefore, an absolutely constant optical magnification can be accurately kept to capture the interference fringe patterns resulting from a combination of light reflected from both the reference flat mirror and the test surface. The experimental result shows that surface profile on a fiber-end with surface features such as a small fiber diameter of 125 microm and a low reflection ratio of less than 4% are measurable. Measurements on a standard calibration ball show that the accuracy of the proposed setup is comparable with that of existing white-light interferometers and stylus profilometers.

摘要

我们描述了一种激光干涉测量系统,该系统使用两个物镜来测量连接光纤端面的表面轮廓。通过使用所提出的照明设计,氦氖激光器作为点光源被转换为扩展光源,这有利于在测试表面附近定位干涉条纹图案。为了获得干涉条纹图案的最佳对比度,使用具有可调反射率的平面镜来适应不同的测试表面。附着在参考镜上的压电换能器可以沿着物镜的光轴精确移动,并允许在不改变电荷耦合器件(CCD)传感器与测试表面之间相对位置的情况下实施四步相移干涉测量法。因此,可以精确保持绝对恒定的光学放大倍数,以捕获由参考平面镜和测试表面反射的光组合产生的干涉条纹图案。实验结果表明,对于具有诸如125微米的小光纤直径和小于4%的低反射率等表面特征的光纤端面,其表面轮廓是可测量的。在标准校准球上的测量表明,所提出装置的精度与现有的白光干涉仪和触针轮廓仪相当。

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