利用非晶硅覆盖层分布式布拉格反射器设计与制造玻璃波导光分插复用器。

Design and fabrication of a glass waveguide optical add-drop multiplexer by use of an amorphous-silicon overlay distributed Bragg reflector.

作者信息

Kim Jaeyoun, Li Guangyu, Winick Kim A

机构信息

Department of Electrical Engineering and Computer Science, The University of Michigan, Ann Arbor, Michigan 48109-2122, USA.

出版信息

Appl Opt. 2004 Jan 20;43(3):671-7. doi: 10.1364/ao.43.000671.

DOI:10.1364/ao.43.000671

PMID:14765929

Abstract

We report the fabrication of a distributed Bragg reflector (DBR) on a silver ion-exchanged glass waveguide with a patterned overlay of sputter-deposited amorphous silicon (a-Si). Using this high-refractive-index overlay DBR technology, we demonstrate a fully functional glass-integrated optic add-drop multiplexer (OADM). The OADM consists of a Mach-Zehnder interferometer (MZI) containing overlay DBR gratings in both arms. The design, fabrication, and characterization procedures of the sputter-deposited a-Si overlay DBR and the ion-exchanged glass waveguide MZI are discussed in detail. The completed 3-cm-long OADM exhibited a 24-dB transmission dip with a 3-dB bandwidth of 0.5 nm. The 1-cm-long a-Si overlay DBR induced an additional attenuation of 1.2 dB. A simplified method for overlay DBR fabrication that utilizes a lift-off technique is also proposed and demonstrated.

摘要

我们报道了在银离子交换玻璃波导上制备分布式布拉格反射器（DBR）的方法，该波导带有溅射沉积非晶硅（a-Si）的图案化覆盖层。利用这种高折射率覆盖层DBR技术，我们展示了一个功能齐全的玻璃集成光分插复用器（OADM）。该OADM由一个马赫曾德尔干涉仪（MZI）组成，其双臂中均包含覆盖层DBR光栅。详细讨论了溅射沉积a-Si覆盖层DBR和离子交换玻璃波导MZI的设计、制造和表征过程。完成的3厘米长的OADM呈现出24分贝的传输凹陷，3分贝带宽为0.5纳米。1厘米长的a-Si覆盖层DBR导致额外的1.2分贝衰减。还提出并展示了一种利用剥离技术的覆盖层DBR制造简化方法。