使用聚焦离子束（FIB）制作的特定位置原位透射电子显微镜（TEM）拉伸试样。

Location specific in situ TEM straining specimens made using FIB.

作者信息

Field R D, Papin P A

机构信息

Los Alamos National Laboratory Division, Material Science and Technology, Mail Stop G770, Los Alamos, NM 87545, USA.

出版信息

Ultramicroscopy. 2004 Dec;102(1):23-6. doi: 10.1016/j.ultramic.2004.08.002.

DOI:10.1016/j.ultramic.2004.08.002

PMID:15556697

Abstract

A method has been devised and demonstrated for producing in situ straining specimens for the transmission electron microscope (TEM) from specific locations in a sample using a dual-beam focused ion beam (FIB) instrument. The specimen is removed from a polished surface in the FIB using normal methods and then attached to a pre-fabricated substrate in the form of a modified TEM tensile specimen. In this manner, specific features of the microstructure of a polished optical mount can be selected for in situ tensile straining. With the use of electron backscattered diffraction (EBSD), this technique could be extended to select specific orientations of the specimen as well.

摘要

已经设计并演示了一种方法，该方法使用双束聚焦离子束（FIB）仪器从样品中的特定位置制备用于透射电子显微镜（TEM）的原位拉伸试样。使用常规方法在FIB中从抛光表面取出试样，然后将其附着到以改进的TEM拉伸试样形式的预制基板上。通过这种方式，可以选择抛光光学支架微观结构的特定特征进行原位拉伸应变。通过使用电子背散射衍射（EBSD），该技术也可以扩展到选择试样的特定取向。