Giannuzzi L A, Drown J L, Brown S R, Irwin R B, Stevie F A
Department of Mechanical, Materials, & Aerospace Engineering, University of Central Florida, Orlando 32816-2450, USA.
Microsc Res Tech. 1998 May 15;41(4):285-90. doi: 10.1002/(SICI)1097-0029(19980515)41:4<285::AID-JEMT1>3.0.CO;2-Q.
A site-specific technique for cross-section transmission electron microscopy specimen preparation of difficult materials is presented. A focused ion beam was used to slice an electron transparent membrane from a specific area of interest within a bulk sample. Micromanipulation lift-out procedures were then used to transport the electron-transparent specimen to a carbon-coated copper grid for subsequent TEM analysis. The FIB (focused ion beam) lift-out technique is a fast method for the preparation of site-specific TEM specimens. The versatility of this technique is demonstrated by presenting cross-sectioned TEM specimens from several types of materials systems, including a multi-layered integrated circuit on a Si substrate, a galvanized steel, a polycrystalline SiC ceramic fiber, and a ZnSe optical ceramic. These specimens have both complex surface geometry and interfaces with complex chemistry. FIB milling was performed sequentially through different layers of cross-sectioned materials so that preferential sputtering was not a factor in preparing TEM specimens. The FIB lift-out method for TEM analysis is a useful technique for the study of complex materials systems for TEM analysis.
本文介绍了一种针对难处理材料进行横截面透射电子显微镜标本制备的特定部位技术。使用聚焦离子束从块状样品内的特定感兴趣区域切出电子透明膜。然后采用微操作取出程序将电子透明标本转移到碳涂覆铜网上，以便进行后续的透射电子显微镜分析。聚焦离子束（FIB）取出技术是制备特定部位透射电子显微镜标本的快速方法。通过展示来自几种材料系统的横截面透射电子显微镜标本，证明了该技术的多功能性，这些材料系统包括硅衬底上的多层集成电路、镀锌钢、多晶碳化硅陶瓷纤维和硒化锌光学陶瓷。这些标本既有复杂的表面几何形状，又有化学性质复杂的界面。对横截面材料的不同层依次进行聚焦离子束铣削，以便在制备透射电子显微镜标本时优先溅射不是一个影响因素。用于透射电子显微镜分析的聚焦离子束取出方法是研究用于透射电子显微镜分析的复杂材料系统的有用技术。
