Schilt Stéphane, Thévenaz Luc, Niklès Marc, Emmenegger Lukas, Hüglin Christoph
Laboratory of Nanophotonics and Metrology, Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland.
Spectrochim Acta A Mol Biomol Spectrosc. 2004 Dec;60(14):3259-68. doi: 10.1016/j.saa.2003.11.032.
An ammonia traces analyser based on photoacoustic spectroscopy is described. The system uses a CO(2) laser and a properly designed resonant photoacoustic cell to achieve ammonia detection at sub-parts-per-billion (ppb) level. The instrument features unattended automatic on-line monitoring of ammonia with a detection limit of 0.1 ppb. Interferences from atmospheric CO(2) and H(2)O are efficiently suppressed by a careful selection of the laser wavelength and a compensation of the water vapour signal made with a high-precision hygrometer. The cell design enables continuous measurement at high flow rates (up to 5 l/min), which guarantees a fast response time of the system for the monitoring of ammonia, a sticky polar molecule that adheres to most surfaces. Various examples of applications of the instrument in the semiconductor industry and for atmospheric pollution monitoring are presented. They demonstrate the excellent performances of the system and its suitability for these applications.
介绍了一种基于光声光谱的氨痕量分析仪。该系统使用二氧化碳激光器和精心设计的共振光声池,以实现十亿分之一(ppb)以下水平的氨检测。该仪器具有无人值守的氨自动在线监测功能,检测限为0.1 ppb。通过仔细选择激光波长以及用高精度湿度计对水蒸气信号进行补偿,可有效抑制大气中二氧化碳和水的干扰。池体设计能够实现高流速(高达5升/分钟)下的连续测量,这保证了系统对氨(一种粘附在大多数表面的粘性极性分子)监测的快速响应时间。文中给出了该仪器在半导体行业和大气污染监测中的各种应用实例。这些实例展示了该系统的卓越性能及其对这些应用的适用性。