Kowalski M P, Cruddace R G, Heidemann K F, Lenke R, Kierey H, Barbee T W, Hunter W R
Naval Research Laboratory, Code 7655, 4555 Overlook Avenue, SW, Washington, DC 20375, USA.
Opt Lett. 2004 Dec 15;29(24):2914-6. doi: 10.1364/ol.29.002914.
We have measured the extreme-ultraviolet (EUV) efficiency of a polymer-overcoated blazed ion-etched holographic test grating. The grating had a magnetron-sputtered Mo2C/Si multilayer coating matched to the grating blaze angle of 2.78 degrees. At an angle of incidence of 5.6 degrees and a wavelength of 15.79 nm, the measured efficiency peaks in the second outside order at 29.9%. The derived groove efficiency is 53.0%. To the best of our knowledge these are the highest values obtained yet at EUV wavelengths from a holographic ion-etched blazed grating.
