文献检索文档翻译深度研究
Suppr Zotero 插件Zotero 插件
邀请有礼套餐&价格历史记录

新学期,新优惠

限时优惠:9月1日-9月22日

30天高级会员仅需29元

1天体验卡首发特惠仅需5.99元

了解详情
不再提醒
插件&应用
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
高级版
套餐订阅购买积分包
AI 工具
文献检索文档翻译深度研究
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利:CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2025

从微机电系统到含碳的纳米机电系统。

From MEMS to NEMS with carbon.

作者信息

Wang Chunlei, Madou Marc

机构信息

Department of Mechanical and Aerospace Engineering, University of California at Irvine, Irvine, CA 92697, USA.

出版信息

Biosens Bioelectron. 2005 Apr 15;20(10):2181-7. doi: 10.1016/j.bios.2004.09.034.


DOI:10.1016/j.bios.2004.09.034
PMID:15741096
Abstract

Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication approach to battery miniaturization, active DNA arrays and a wide variety of chemical and biological sensors. In C-MEMS, photoresist is patterned by photolithography and subsequently pyrolyzed at high-temperatures in an oxygen-free environment. We established that it is possible to use C-MEMS to create very high-aspect ratio carbon structures (e.g. posts with an aspect ratio >10), suspended carbon plates and suspended carbon nanowires (C-NEMS). By changing the lithography conditions, soft and hard baking times and temperatures, additives to the resist, pyrolysis time, temperature and environment, C-MEMS permits a wide variety of interesting new MEMS and NEMS applications that employ structures having a wide variety of shapes, resistivities and mechanical properties. We also demonstrate that arrays of high-aspect ratio carbon posts can be charged/discharged with Li and this enables the fabrication of a smart switchable array of batteries.

摘要

我们在碳微机电系统(C-MEMS)方面的工作表明,C-MEMS可能为电池小型化、活性DNA阵列以及各种化学和生物传感器提供一种非常有趣的材料和微制造方法。在C-MEMS中,光刻胶通过光刻进行图案化,随后在无氧环境中高温热解。我们证实,可以使用C-MEMS来制造非常高纵横比的碳结构(例如纵横比>10的柱体)、悬浮碳板和悬浮碳纳米线(C-NEMS)。通过改变光刻条件、软烘和硬烘时间及温度、光刻胶添加剂、热解时间、温度和环境,C-MEMS允许进行各种各样有趣的新型MEMS和NEMS应用,这些应用采用具有各种形状、电阻率和机械性能的结构。我们还证明,高纵横比碳柱阵列可以用锂进行充电/放电,这使得制造智能可切换电池阵列成为可能。

相似文献

[1]
From MEMS to NEMS with carbon.

Biosens Bioelectron. 2005-4-15

[2]
Asymmetric end-functionalization of carbon nanotubes.

Small. 2005-12

[3]
Control of bio-MEMS surface chemical properties in micro fluidic devices for biological applications.

J Nanosci Nanotechnol. 2006-11

[4]
Thermoelectric microdevice fabricated by a MEMS-like electrochemical process.

Nat Mater. 2003-8

[5]
Nanotubes: controlling conductance.

Nat Mater. 2005-7

[6]
Controlled growth and characterization of two-dimensional single-walled carbon-nanotube networks for electrical applications.

Small. 2007-5

[7]
Chemically modified multiwalled carbon nanotubes as an additive for supercapacitors.

Small. 2006-3

[8]
Polyaniline-coated Fe3O4 nanoparticle-carbon-nanotube composite and its application in electrochemical biosensing.

Small. 2008-4

[9]
Metal nanoparticles and related materials supported on carbon nanotubes: methods and applications.

Small. 2006-2

[10]
Integrated three-dimensional microelectromechanical devices from processable carbon nanotube wafers.

Nat Nanotechnol. 2008-5

引用本文的文献

[1]
Review on Carbon-Based Micro and Nano Electro-Mechanical Systems for Biotechnological Application.

Recent Pat Nanotechnol. 2025

[2]
Electrical stimulation of neuroretinas with 3D pyrolytic carbon electrodes.

Biomed Microdevices. 2025-2-11

[3]
Beyond two dimensions: Exploring 3D dielectrophoresis for microparticle control using carbon electrodes.

PLoS One. 2024

[4]
Comparing Carbon Origami from Polyaramid and Cellulose Sheets.

Micromachines (Basel). 2022-3-24

[5]
Fabrication of High Surface Area Microporous ZnO from ZnO/Carbon Sacrificial Composite Monolith Template.

Micromachines (Basel). 2022-2-20

[6]
In-Situ Integration of 3D C-MEMS Microelectrodes with Bipolar Exfoliated Graphene for Label-Free Electrochemical Cancer Biomarkers Aptasensor.

Micromachines (Basel). 2022-1-9

[7]
Carbon-Based Materials for Articular Tissue Engineering: From Innovative Scaffolding Materials toward Engineered Living Carbon.

Adv Healthc Mater. 2022-1

[8]
Sub-10 nm nanogap fabrication on suspended glassy carbon nanofibers.

Microsyst Nanoeng. 2020-1-27

[9]
Fabrication of patterned graphitized carbon wires using low voltage near-field electrospinning, pyrolysis, electrodeposition, and chemical vapor deposition.

Microsyst Nanoeng. 2020-1-13

[10]
Hierarchical Porous Carbon Electrodes with Sponge-Like Edge Structures for the Sensitive Electrochemical Detection of Heavy Metals.

Sensors (Basel). 2021-2-14

文献AI研究员

20分钟写一篇综述,助力文献阅读效率提升50倍

立即体验

用中文搜PubMed

大模型驱动的PubMed中文搜索引擎

马上搜索

推荐工具

医学文档翻译智能文献检索