Wang Chunlei, Madou Marc
Department of Mechanical and Aerospace Engineering, University of California at Irvine, Irvine, CA 92697, USA.
Biosens Bioelectron. 2005 Apr 15;20(10):2181-7. doi: 10.1016/j.bios.2004.09.034.
Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication approach to battery miniaturization, active DNA arrays and a wide variety of chemical and biological sensors. In C-MEMS, photoresist is patterned by photolithography and subsequently pyrolyzed at high-temperatures in an oxygen-free environment. We established that it is possible to use C-MEMS to create very high-aspect ratio carbon structures (e.g. posts with an aspect ratio >10), suspended carbon plates and suspended carbon nanowires (C-NEMS). By changing the lithography conditions, soft and hard baking times and temperatures, additives to the resist, pyrolysis time, temperature and environment, C-MEMS permits a wide variety of interesting new MEMS and NEMS applications that employ structures having a wide variety of shapes, resistivities and mechanical properties. We also demonstrate that arrays of high-aspect ratio carbon posts can be charged/discharged with Li and this enables the fabrication of a smart switchable array of batteries.
我们在碳微机电系统(C-MEMS)方面的工作表明,C-MEMS可能为电池小型化、活性DNA阵列以及各种化学和生物传感器提供一种非常有趣的材料和微制造方法。在C-MEMS中,光刻胶通过光刻进行图案化,随后在无氧环境中高温热解。我们证实,可以使用C-MEMS来制造非常高纵横比的碳结构(例如纵横比>10的柱体)、悬浮碳板和悬浮碳纳米线(C-NEMS)。通过改变光刻条件、软烘和硬烘时间及温度、光刻胶添加剂、热解时间、温度和环境,C-MEMS允许进行各种各样有趣的新型MEMS和NEMS应用,这些应用采用具有各种形状、电阻率和机械性能的结构。我们还证明,高纵横比碳柱阵列可以用锂进行充电/放电,这使得制造智能可切换电池阵列成为可能。
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