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两种不同的大气压微波(2.45吉赫兹)诱导氩等离子体的光谱表征。

Spectroscopic characterization of two different microwave (2.45 GHz) induced argon plasmas at atmospheric pressure.

作者信息

García M C, Yubero C, Calzada M D, Martínez-Jiménez M P

机构信息

Departamento de Física Aplicada, Edificio C-2, Campus Universitario de Rabanales, Universidad de Córdoba, E-14071 Córdoba, Spain.

出版信息

Appl Spectrosc. 2005 Apr;59(4):519-28. doi: 10.1366/0003702053641405.

Abstract

A surface-wave-sustained discharge created by using a surfatron device in a tube open to the atmosphere can be used to maintain a microwave (2.45 GHz) plasma at atmospheric pressure at powers of less than 300 W. The TIA (Torche a Injection Axiale) is a device also producing a plasma that, moreover, permits us to work at high power (higher than 200 W and up to 1000 W). A study of the departure from the thermodynamic equilibrium existing in the argon plasmas created by both devices has been done by using optical emission spectroscopy techniques in order to characterize them and to evaluate their possible advantages when they are used for applied purposes.

摘要

利用向大气开放的管中的表面波维持放电装置所产生的表面波维持放电,可用于在功率低于300W的情况下在大气压下维持微波(2.45GHz)等离子体。轴向注入火炬(TIA)也是一种产生等离子体的装置,此外,它还使我们能够在高功率(高于200W,最高可达1000W)下工作。为了对这两种装置产生的氩等离子体进行表征并评估它们在应用时可能具有的优势,已经利用光发射光谱技术对其偏离热力学平衡的情况进行了研究。

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