Almqvist Monica, Törndahl Marcus, Nilsson Mikael, Lilliehorn Tobias
Department of Electrical Measurements, Lund Institute of Technology, Lund, Sweden.
IEEE Trans Ultrason Ferroelectr Freq Control. 2005 Dec;52(12):2298-302. doi: 10.1109/tuffc.2005.1563272.
This paper demonstrates that light diffraction tomography can be used to measure the acoustic field of micromachined ultrasonic transducers (MUT) in cases in which standard methods like hydrophone and microphone measurements fail. Two types of MUTs have been characterized with the method, one air-coupled capacitive MUT (cMUT) and one waterloaded continuous wave (CW) miniature multilayer lead zirconate titanate (PZT) transducer. Light diffraction tomography is an ultrasound measurement method with some special characteristics. Based on the interaction of light and ultrasound, it combines light intensity measurements with tomography algorithms to produce a measurement system. The method offers nonperturbing pressure measurements with high spatial resolution. It has been shown that, under certain circumstances, light diffraction tomography can be used as an absolute pressure measurement method with accuracy in the order of 10% in water and 13% in air. The results show that air-coupled cMUTs in the frequency range of about 1 MHz as well as the extreme near field of a miniaturized CW 10 MHz water-loaded transducer were successfully characterized with light diffraction tomography.
本文表明，在水听器和麦克风测量等标准方法失效的情况下，光衍射层析成像可用于测量微机械超声换能器（MUT）的声场。该方法已对两种类型的MUT进行了表征，一种是空气耦合电容式MUT（cMUT），另一种是水负载连续波（CW）微型多层锆钛酸铅（PZT）换能器。光衍射层析成像是一种具有一些特殊特性的超声测量方法。基于光与超声的相互作用，它将光强测量与层析算法相结合，形成一个测量系统。该方法提供了具有高空间分辨率的非侵入式压力测量。研究表明，在某些情况下，光衍射层析成像可作为一种绝对压力测量方法，在水中的精度约为10%，在空气中的精度约为13%。结果表明，利用光衍射层析成像成功地表征了频率范围约为1MHz的空气耦合cMUT以及小型化CW 10MHz水负载换能器的极近场。
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