Effect of substrate temperature on morphology and electrochemical performance of radio frequency magnetron sputtered lithium nickel vanadate films used as negative electrodes for lithium microbatteries.

Lithium nickel vanadate thin films were prepared by radio frequency magnetron sputtering at various substrate temperatures (Ts). These thin films have been investigated as anode electrode material in the use of microbatteries. Films were characterized by Rutherford backscattering spectroscopy, nuclear reaction analysis, Auger electron spectroscopy, glancing-incidence X-ray diffraction analysis, Raman spectroscopy, scanning electron microscopy, atomic force microscopy, and high-resolution transmission electron microscopy techniques. The anodic electrochemical performances of the films have been evaluated by cyclic voltammetry at a scan rate of 1 mV/s and by galvanostatic cycling, with lithium metal as the counter and the reference electrode, and cycled in the range of 0.02-3.0 V at a current density of 75 microA/cm2. Thin films prepared at a Ts of 650 degrees C show a discharge capacity at the 20th cycle of 1100 (+/-10) mAh/g, which exhibited excellent capacity retention with a small capacity fade.