通过离子束溅射用复合薄膜制成的 rugate 滤波器。

Rugate filter made with composite thin films by ion-beam sputtering.

作者信息

Lee Cheng-Chung, Tang Chien-Jen, Wu Jean-Yee

机构信息

Thin Film Technology Center and Institute of Optical Sciences, National Central University, Chung-Li 32001, Taiwan, China.

出版信息

Appl Opt. 2006 Mar 1;45(7):1333-7. doi: 10.1364/ao.45.001333.

DOI:10.1364/ao.45.001333

PMID:16539230

Abstract

Composite films of Ta-Si oxide with refractive indices that varied from 1.48 to 2.15 were realized by using rf ion-beam sputtering. All the composite films were amorphous and had a surface roughness of less than 0.3 nm. The inhomogeneity of the composite was discussed, and a rugate filter was designed and fabricated by automatic computer control.

摘要

通过射频离子束溅射制备了折射率在1.48至2.15之间变化的Ta-Si氧化物复合薄膜。所有复合薄膜均为非晶态，表面粗糙度小于0.3纳米。讨论了复合材料的不均匀性，并通过计算机自动控制设计并制备了一种波纹滤光片。