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基于斜入射角下反射率和透射率测量的薄膜特性研究。

Characterization of thin films based on reflectance and transmittance measurements at oblique angles of incidence.

作者信息

Lamminpää Antti, Nevas Saulius, Manoocheri Farshid, Ikonen Erkki

机构信息

Metrology Research Institute, Helsinki University of Technology, P.O. Box 3000, FI-02015 TKK, Finland.

出版信息

Appl Opt. 2006 Mar 1;45(7):1392-6. doi: 10.1364/ao.45.001392.

DOI:10.1364/ao.45.001392
PMID:16539241
Abstract

The optical parameters of a SiO2 thin-film coating determined from the spectral reflectance and transmittance measurements at various incidence angles, including the normal incidence and the Brewster's angle, are compared in this paper. The high-accuracy measurements were carried out through visible-near-infrared spectral regions by using our purpose-built instruments. The optical parameters obtained from the reflectance and the transmittance data are consistent over the angles of incidence and agree within 0.2%. The effect of important systematic factors in the oblique-incidence spectrophotometric measurements is also discussed.

摘要

本文比较了通过在包括垂直入射和布儒斯特角在内的不同入射角下进行光谱反射率和透射率测量所确定的SiO₂薄膜涂层的光学参数。使用我们专门制造的仪器在可见-近红外光谱区域进行了高精度测量。从反射率和透射率数据获得的光学参数在入射角范围内是一致的,并且在0.2%以内相符。还讨论了斜入射分光光度测量中重要系统因素的影响。

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