von Blanckenhagen Bernhard
Carl Zeiss AG, Coating Technology, Corporate Research and Technology, 73446 Oberkochen, Germany.
Appl Opt. 2006 Mar 1;45(7):1539-43. doi: 10.1364/ao.45.001539.
Liquid-crystal-on-silicon- (LCoS-) based digital projection systems require high-performance polarizing beam splitters. The classical beam-splitter cube with an immersed interference coating can fulfill these requirements. Practical layer designs can be generated by computer optimization using the classic MacNeille polarizer layer design as the starting layer design. Multilayer structures with 100 nm bandwidth covering the blue, green, or red spectral region and one design covering the whole visible spectral region are designed. In a second step these designs are realized by using plasma-ion-assisted deposition. The performance of the practical beam-splitter cubes is compared with the theoretical performance of the layer designs.
基于硅基液晶(LCoS)的数字投影系统需要高性能的偏振分束器。带有浸没式干涉涂层的经典分束器立方体能够满足这些要求。可以通过计算机优化,以经典的麦克尼尔偏振器层设计作为起始层设计来生成实际的层设计。设计了覆盖蓝色、绿色或红色光谱区域且带宽为100纳米的多层结构,以及一种覆盖整个可见光谱区域的设计。第二步,通过等离子体离子辅助沉积来实现这些设计。将实际分束器立方体的性能与层设计的理论性能进行比较。