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通过电化学原子层外延(EC-ALE)在InP(100)上进行CdTe电沉积:利用超高真空电化学(UHV-EC)的研究

CdTe electrodeposition on InP(100) via electrochemical atomic layer epitaxy (EC-ALE): studies using UHV-EC.

作者信息

Muthuvel Madhivanan, Stickney John L

机构信息

Department of Chemistry, University of Georgia, Athens, Georgia 30602, USA.

出版信息

Langmuir. 2006 Jun 6;22(12):5504-8. doi: 10.1021/la053353q.

Abstract

The II-VI compound semiconductor CdTe was electrodeposited on InP(100) surfaces using electrochemical atomic layer epitaxy (EC-ALE). CdTe was deposited on a Te-modified InP(100) surface using this atomic layer by atomic layer methodology. The deposit started with formation of an atomic layer of Te on the InP(100) surface, as Cd was observed not to form an underpotential deposition (UPD) layer on InP(100), although it was found to UPD on Te atomic layers. On the In-terminated 'clean' InP(100) surface, Te was deposited at -0.80 V from a 0.1 mM solution of TeO2, resulting in formation of a Te atomic layer and some small amount of bulk Te. The excess bulk Te was then removed by reduction in blank solution at -0.90 V, leaving a Te atomic layer. Given the presences of the Te atomic layer, it was then possible to form an atomic layer of Cd by UPD at -0.58 V to complete the formation of a CdTe monolayer by EC-ALE. That cycle was then repeated to demonstrate the applicability of the cycle to the formation of CdTe nanofilms. Auger spectra recorded after the first three cycles of CdTe deposition on InP(100) were consistent with the layer-by-layer CdTe growth. It is interesting to note that Cd did not form a UPD deposit on the In-terminated InP(100) surface and only formed Cd clusters at an overpotential. This issue is probably related to the inability of the Cd and In to form a stable surface compound.

摘要

采用电化学原子层外延(EC-ALE)技术,在InP(100)表面电沉积II-VI族化合物半导体CdTe。通过这种原子层逐原子层的方法,将CdTe沉积在经Te修饰的InP(100)表面上。沉积过程始于在InP(100)表面形成一层Te原子层,因为观察到Cd在InP(100)上不会形成欠电位沉积(UPD)层,尽管它在Te原子层上会发生UPD。在In端“清洁”的InP(100)表面上,从0.1 mM的TeO2溶液中于-0.80 V沉积Te,从而形成一层Te原子层和少量的块状Te。然后通过在-0.90 V的空白溶液中还原去除过量的块状Te,留下一层Te原子层。鉴于存在Te原子层,随后可以通过在-0.58 V进行UPD形成一层Cd原子层,以通过EC-ALE完成CdTe单层的形成。然后重复该循环,以证明该循环在CdTe纳米薄膜形成中的适用性。在InP(100)上进行CdTe沉积的前三个循环后记录的俄歇光谱与CdTe的逐层生长一致。有趣的是,Cd在In端的InP(100)表面上不会形成UPD沉积物,仅在过电位下形成Cd簇。这个问题可能与Cd和In无法形成稳定的表面化合物有关。

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