Hoque E, DeRose J A, Kulik G, Hoffmann P, Mathieu H J, Bhushan B
Laboratoire de Métallurgie Chimique, Institut des Matériaux, Ecole Polytechnique Fédérale de Lausanne, CH-1015 Lausanne, Switzerland.
J Phys Chem B. 2006 Jun 8;110(22):10855-61. doi: 10.1021/jp061327a.
The surface properties of aluminum, such as chemical composition, roughness, friction, adhesion, and wear, can play an important role in the performance of micro-/nano-electromechanical systems, e.g., digital micromirror devices. Aluminum substrates chemically reacted with octadecylphosphonic acid (ODP/Al), decylphosphonic acid (DP/Al), and octylphosphonic acid (OP/Al) have been investigated and characterized by X-ray photoelectron spectroscopy (XPS), contact angle measurements, and atomic force microscopy (AFM). XPS analysis confirmed the presence of alkylphosphonate molecules on ODP/Al, DP/Al, and OP/Al. No phosphonates were found on bare Al as a control. The sessile drop static contact angle of pure water on ODP/Al and DP/Al was typically more than 115 degrees and on OP/Al typically less than 105 degrees indicating that all phosphonic acid reacted Al samples were highly hydrophobic. The root-mean-square surface roughness for ODP/Al, DP/Al, OP/Al, and bare Al was less than 15 nm as determined by AFM. The surface energy for ODP/Al and DP/Al was determined to be approximately 21 and 22 mJ/m2, respectively, by the Zisman plot method, compared to 25 mJ/m2 for OP/Al. ODP/Al and OP/Al were studied by friction force microscopy, a derivative of AFM, to better understand their micro-/nano-tribological properties. ODP/Al gave the lowest coefficient of friction values while bare Al gave the highest. The adhesion forces for ODP/Al and OP/Al were comparable.
铝的表面性质,如化学成分、粗糙度、摩擦力、附着力和磨损等,在微纳机电系统(如数字微镜器件)的性能中起着重要作用。已对与十八烷基膦酸(ODP/Al)、癸基膦酸(DP/Al)和辛基膦酸(OP/Al)发生化学反应的铝基板进行了研究,并通过X射线光电子能谱(XPS)、接触角测量和原子力显微镜(AFM)进行了表征。XPS分析证实了ODP/Al、DP/Al和OP/Al上存在烷基膦酸盐分子。作为对照,在裸露的铝上未发现膦酸盐。纯水在ODP/Al和DP/Al上的静滴静态接触角通常大于115度,在OP/Al上通常小于105度,这表明所有膦酸反应的铝样品都具有高度疏水性。通过AFM测定,ODP/Al、DP/Al、OP/Al和裸露铝的均方根表面粗糙度小于15纳米。通过Zisman图法测定,ODP/Al和DP/Al的表面能分别约为21和22 mJ/m²,而OP/Al为25 mJ/m²。为了更好地了解ODP/Al和OP/Al的微纳摩擦学性质,采用了AFM的衍生技术摩擦力显微镜对其进行了研究。ODP/Al的摩擦系数最低,而裸露铝的摩擦系数最高。ODP/Al和OP/Al的附着力相当。