Kutavichus Vitaly P, Filippov Valery V, Huzouski Vitali H
B.I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, Belarus.
Appl Opt. 2006 Jul 1;45(19):4547-53. doi: 10.1364/ao.45.004547.
A method for determining the optical constants and the thickness of weakly absorbing thin films on substrates is proposed. In this method only the reflectance and transmittance spectra obtained at a single arbitrary angle of incidence are used, provided that the former reveals several interference extrema. The calculation procedure is based on relatively simple relations suitable for the programmed realization and does not call for the prescription of the initial values of the parameters to be determined. The method proposed is fairly accurate and allows one to uniquely solve the inverse problem of spectrophotometry. The optical constants and the thickness of an As(x)Se(y) film formed on a glass substrate have been determined by the proposed method in the visible region of the spectrum.
提出了一种确定衬底上弱吸收薄膜光学常数和厚度的方法。在该方法中，仅使用在单个任意入射角下获得的反射率和透射率光谱，前提是前者显示出几个干涉极值。计算过程基于适用于编程实现的相对简单的关系，并且不需要规定待确定参数的初始值。所提出的方法相当准确，能够唯一地解决分光光度法的反问题。利用所提出的方法在光谱的可见光区域确定了形成在玻璃衬底上的As(x)Se(y)薄膜的光学常数和厚度。
