Chon Kwon Su, Namba Yoshiharu, Yoon Kwon-Ha
Institute for Radiological Imaging Science, Wonkwang University, South Korea.
Appl Opt. 2006 Jul 1;45(19):4609-16. doi: 10.1364/ao.45.004609.
A multilayer coating is a useful addition to a mirror in the x-ray region and has been applied to normal incidence mirrors used with soft x rays. When a multilayer coating is used on grazing incidence optics, higher performance can be achieved than without it. Cr/Sc multilayers coated on a Wolter type I mirror substrate for a soft x-ray microscope are considered. The reflectivity and effective solid angle are calculated for Wolter type I mirrors with uniform and laterally graded multilayer coatings. The laterally graded multilayer mirror showed superior x-ray performance, and the multilayer tolerances were relaxed. This multilayer mirror could be especially useful in the soft x-ray microscope intended for biological applications.
多层涂层是X射线区域镜子的一种有用附加物，已应用于与软X射线一起使用的正入射镜子。当在掠入射光学器件上使用多层涂层时，可实现比不使用时更高的性能。考虑了在用于软X射线显微镜的沃尔特I型镜基板上涂覆的Cr/Sc多层膜。计算了具有均匀和横向渐变多层涂层的沃尔特I型镜的反射率和有效立体角。横向渐变多层镜显示出优异的X射线性能，并且多层公差得到了放宽。这种多层镜在用于生物应用的软X射线显微镜中可能特别有用。
