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Determination of CoSi2 self-aligned nanostructures with grazing incidence X-ray absorption spectroscopy.

作者信息

Carter Joshua D, Shan Fang, Guo Ting

机构信息

Department of Chemistry, University of California, One Shields Avenue, Davis, California 95616, USA.

出版信息

J Phys Chem B. 2005 Mar 10;109(9):4118-22. doi: 10.1021/jp044836q.

DOI:10.1021/jp044836q
PMID:16851471
Abstract

Self-aligned nanostructures (SAN) made by reacting Co nanoparticles with crystalline Si substrates at high temperatures were studied with grazing incidence X-ray absorption spectroscopy (GI-XAS). The results from extended X-ray absorption fine structure (EXAFS) analysis and X-ray absorption near-edge spectroscopy (XANES) were used to identify SAN as crystalline CoSi2. Theoretical calculations of EXAFS and XANES spectra of several crystalline cobalt silicides were performed with the FEFF8 package. On the basis of these studies, the SAN samples were determined to contain nearly pure CoSi2.

摘要

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