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由化学镀铜引起的与(硫酸铜 + 氢氟酸)水溶液接触的p型硅的电化学势的周期性和混沌振荡。

Periodic and chaotic oscillations of the electrochemical potential of p-Si in contact with an aqueous (CuSO4+HF) solution, caused by electroless Cu deposition.

作者信息

Nagai Tomoyuki, Nakanishi Shuji, Mukouyama Yoshiharu, Ogata Yukio H, Nakato Yoshihiro

机构信息

Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan.

出版信息

Chaos. 2006 Sep;16(3):037106. doi: 10.1063/1.2348766.

Abstract

Periodic and chaotic oscillations were observed for the potential of p-type Si(111) immersed in an aqueous (HF+CuSO(4)) solution, accompanied by electroless Cu deposition on p-Si. They were, to our knowledge, the first examples of open-circuit potential oscillations observed for semiconductor electrodes. The oscillations appeared only when the Cu deposit formed a continuous porous film composed of mutually connected submicrometer-sized particles. Besides, the Si surface was kept flat within the size less than 50 nm even after the prolonged oscillation for a few hours, though the Si surface should be etched considerably with HF for this time. A plausible model is proposed for the periodic oscillation, in which interestingly coupling of autocatalytic shift in the flat-band potential of Si (U(fb)) caused by the change in the coverage of the Si oxide and the connection and disconnection of the Cu film with the Si surface plays the key role. The appearance of the chaotic oscillation is also explained by taking into account an oscillation-coupled change in the HF or Cu(2+) concentration near the Si surface.

摘要

观察到浸没在(HF + CuSO₄)水溶液中的p型Si(111)的电位出现周期性和混沌振荡,同时在p-Si上有化学镀铜沉积。据我们所知,它们是半导体电极开路电位振荡的首个实例。仅当铜沉积物形成由相互连接的亚微米级颗粒组成的连续多孔膜时,振荡才会出现。此外,即使经过数小时的长时间振荡,Si表面在小于50 nm的尺寸范围内仍保持平整,尽管此时Si表面会被HF大量蚀刻。针对周期性振荡提出了一个合理的模型,其中有趣的是,由Si氧化物覆盖率变化引起的Si平带电位(U(fb))的自催化位移以及Cu膜与Si表面的连接和断开起到了关键作用。通过考虑Si表面附近HF或Cu²⁺浓度的振荡耦合变化,也解释了混沌振荡的出现。

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