Approach for simultaneous measurement of two-dimensional angular distribution of charged particles. II. Deceleration and focusing of wide-angle beams using a curved mesh lens.

Recently, it was shown that using an ellipsoidal mesh in an einzel-type lens, spherical aberration can be corrected over a wide acceptance angle of up to 120 degrees. The present paper creates the possibility for beam analysis by achieving dramatic improvements in deceleration lens capabilities. This provides a scheme for simultaneous angular distribution measurement suitable for application to high-energy charged-particle beams up to around 10 keV. We consider the behavior of wide-angle charged-particle beams in electrostatic fields given by simple solutions of the Laplace equation, starting with a discussion on a spherically symmetric deceleration field. A beam focusing over a wide acceptance angle of 100 degrees is found in a special spherically symmetric field. However, in many cases of the spherically symmetric field, focusing of wide-angle beams is obstructed by the presence of spherical aberration. We show that the spherical aberration can be corrected by two kinds of deformation of the spherically symmetric field, a deformation of the field under a spherical boundary condition and an ellipsoidal deformation of the field. We study practical realization of such fields under the use of a few electrodes and a curved mesh (spherical or ellipsoidal mesh). Some variations of the arrangement of electrodes are considered, and simple designs of deceleration lenses with wide acceptance angles of up to 120 degrees are obtained. Here fine focusing of wide-angle beams can be achieved in a three-electrode deceleration lens with an ellipsoidal mesh.