Gorchakov Sergey, Loffhagen Detlef, Uhrlandt Dirk
INP Greifswald, Friedrich-Ludwig-Jahn-Strasse 19, Greifswald 17489, Germany.
Phys Rev E Stat Nonlin Soft Matter Phys. 2006 Dec;74(6 Pt 2):066401. doi: 10.1103/PhysRevE.74.066401. Epub 2006 Dec 5.
The influence of the kinetics of excited atoms on the characteristics of an inductively coupled plasma in argon during the early afterglow is studied. A self-consistent model including the nonlocal approach for the kinetic treatment of the electrons is applied. Parameters of both the steady state of the rf discharge and the decay phase are presented. Results for the steady-state densities of excited atoms as well as temporal evolutions of the wall potential and mean energy of electrons are discussed in comparison with experimental data available from the literature. The ionization kinetics of the electrons, the electron power balance, and the main kinetic pathways for excited argon atoms are analyzed in the pressure range between 0.5 and 133 Pa . In particular, a significant influence of the excited atoms on the plasma behavior in steady state and during the afterglow is found.
研究了激发态原子动力学对氩气中电感耦合等离子体在早期余辉期间特性的影响。应用了一个自洽模型，该模型包括用于电子动力学处理的非局部方法。给出了射频放电稳态和衰减阶段的参数。将激发态原子的稳态密度结果以及壁电位和电子平均能量的时间演化与文献中的实验数据进行了比较讨论。在0.5至133 Pa的压力范围内分析了电子的电离动力学、电子功率平衡以及激发态氩原子的主要动力学途径。特别地，发现激发态原子对稳态和余辉期间的等离子体行为有显著影响。
