Optical readout method for microcantilever array sensing and its sensitivity analysis.

作者信息

Miao Zhengyu, Zhang Qingchuan, Guo Zheying, Wu Xiaoping, Chen Dapeng

机构信息

Chinese Academy of Science Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei.

出版信息

Opt Lett. 2007 Mar 15;32(6):594-6. doi: 10.1364/ol.32.000594.

DOI:10.1364/ol.32.000594

PMID:17308571

Abstract

An optical readout platform using a knife-edge filter for detecting the bending of a bimaterial microcantilever array is established, and the influence of stress-induced micromirror deformation on the optical detection sensitivity is discussed. The influence of deformation is modeled theoretically and validated experimentally. Analysis shows that the optical detection sensitivity will decrease by 50% when the mirror has a deformation of lambda/5 (lambda is the wavelength of readout light). Finally, an infrared image is obtained by the platform.

摘要