Senesac L R, Corbeil J L, Rajic S, Lavrik N V, Datskos P G
Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, TN 37831-6141, USA.
Ultramicroscopy. 2003 Oct-Nov;97(1-4):451-8. doi: 10.1016/S0304-3991(03)00073-1.
Uncooled bimaterial microcantilever detectors were fabricated and used to obtain infrared (IR) images of objects at temperatures ranging from room temperature to a few hundred degrees C. Images were obtained using both single 50 micro m x 50 micro m microcantilever IR detectors and arrays of microcantilever detectors. Thermal radiation from the target object was imaged onto the detector and the resulting temperature change caused microcantilever bending due to the bimaterial effect. This micromechanical bending was measured using two different non-contact optical readout techniques and IR images were obtained. A smaller size (20 micro m x 20 micro m) microcantilever IR detector was also used to capture IR images of near room temperature objects.
制备了非制冷双材料微悬臂梁探测器，并用于获取室温至几百摄氏度范围内物体的红外（IR）图像。使用单个50μm×50μm的微悬臂梁红外探测器和微悬臂梁探测器阵列获取图像。目标物体的热辐射成像到探测器上，由于双材料效应，产生的温度变化导致微悬臂梁弯曲。使用两种不同的非接触式光学读出技术测量这种微机械弯曲，并获得红外图像。还使用了尺寸更小（20μm×20μm）的微悬臂梁红外探测器来捕获近室温物体的红外图像。
