Lee Jin-Seok, Yang Ho-Soon, Hahn Jae-Won
School of Mechanical Engineering, Yonsei University, Seoul, Korea.
Appl Opt. 2007 Mar 20;46(9):1411-5. doi: 10.1364/ao.46.001411.
We developed a new, to the best of our knowledge, test method to measure the wavefront error of the high-NA optics that is used to read the information on the high-capacity optical data storage devices. The main components are a pinhole point source and a Shack-Hartmann sensor. A pinhole generates the high-NA reference spherical wave, and a Shack-Hartmann sensor constructs the wavefront error of the target optics. Due to simplicity of the setup, it is easy to use several different wavelengths without significant changes of the optical elements in the test setup. To reduce the systematic errors in the system, a simple calibration method was developed. In this manner, we could measure the wavefront error of the NA 0.9 objective with the repeatability of 0.003 lambda rms (lambda = 632.8 nm) and the accuracy of 0.01 lambda rms.
据我们所知，我们开发了一种新的测试方法，用于测量用于读取高容量光学数据存储设备上信息的高数值孔径光学元件的波前误差。主要组件是一个针孔点光源和一个夏克-哈特曼传感器。针孔产生高数值孔径参考球面波，夏克-哈特曼传感器构建目标光学元件的波前误差。由于设置简单，在测试装置中使用几种不同波长时，无需对光学元件进行重大更改即可轻松实现。为了减少系统中的系统误差，我们开发了一种简单的校准方法。通过这种方式，我们能够以0.003λ均方根值（λ = 632.8 nm）的重复性和0.01λ均方根值的精度测量数值孔径为0.9的物镜的波前误差。
