Wu Chyan-Chyi, Wu Wen-Jong, Pan Zheng-Seng, Lee Chih-Kung
Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu 300, Taiwan.
Appl Opt. 2007 Jun 1;46(16):3169-76. doi: 10.1364/ao.46.003169.
We introduce a new configuration for the optical head of a newly developed diffractive laser encoder system. This configuration has a high manufacturing tolerance and a high head-to-scale alignment tolerance, both of which can enhance the wider potential applicability of this newly designed laser encoder. The measurement principles of the encoder are discussed and detailed. We optimized the grating shape and analyzed the impact of the optical components and their arrangement on the measurement error. The head-to-scale alignment tolerance and the arrangement of components in the encoder were also determined. Finally, the measurement performance was evaluated and analyzed. Under nonenvironmentally controlled conditions, the measurement accuracy was found to be 37.3 nm with a standard deviation of 25.4 nm.
