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基于具有几何仰角聚焦的 1-3 复合材料的 40 兆赫兹线性阵列的制造与性能

Fabrication and performance of a 40-MHz linear array based on a 1-3 composite with geometric elevation focusing.

作者信息

Brown Jeremy A, Foster F Stuart, Needles Andrew, Cherin Emmanuel, Lockwood Geoffrey R

机构信息

Sunnybrook Health Sciences Centre, Toronto, ON, Canada.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2007 Sep;54(9):1888-94. doi: 10.1109/tuffc.2007.473.

Abstract

The fabrication and performance of a 256-element high-frequency (40-MHz) linear array is described. The array was fabricated using a high-frequency 1-3 PZT-polymer composite material developed in our laboratory. The spacing of the pillars in the composite was chosen to match the 40-microm center-to-center element spacing of the array electrodes. The element electrodes were created using photolithography, and connections to the electrodes were made using ultrasonic wire bonding. The array was focused in the elevation direction by geometrically shaping the composite material using a cylindrical die with a 6-mm radius of curvature. The resulting transducer produced pulses with a -6 dB two-way bandwidth of 50% and a peak-to-peak pressure of 503 kPa when excited with a +/-30 V monocycle pulse. The measured one-way (-6 dB) directivity for a single array element was 24 degrees and the -3 dB one-way elevation beamwidth was measured to be 130 microm. The radiation pattern for a focused 64-element subaperture was measured by mechanically translating the aperture above a needle hydrophone. A -3 dB one-way beamwidth of 97 microm was found at a depth of 6 mm. The one-way radiation pattern decreased smoothly to less than -30 dB at a lateral distance of 640 microm.

摘要

描述了一种256阵元高频(40兆赫)线性阵列的制造及性能。该阵列采用我们实验室研发的高频1-3型锆钛酸铅-聚合物复合材料制造。复合材料中柱体的间距被选定为与阵列电极40微米的中心距相匹配。元件电极通过光刻技术制作,电极连接则采用超声引线键合。通过使用曲率半径为6毫米的圆柱形模具对复合材料进行几何塑形,使阵列在仰角方向上聚焦。当用+/-30伏单周期脉冲激励时,所得到的换能器产生的脉冲-6分贝双向带宽为50%,峰峰值压力为503千帕。单个阵列元件测得的单向(-6分贝)指向性为24度,测得的-3分贝单向仰角波束宽度为130微米。通过在针状水听器上方机械平移孔径来测量聚焦的64阵元子孔径的辐射方向图。在6毫米深度处发现-3分贝单向波束宽度为97微米。单向辐射方向图在横向距离640微米处平滑下降至低于-30分贝。

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