Brown Jeremy A, Démoré Christine E M, Lockwood Geoffrey R
Department of Physics, Queen's University, Kingston, ON, Canada.
IEEE Trans Ultrason Ferroelectr Freq Control. 2004 Aug;51(8):1010-7. doi: 10.1109/tuffc.2004.1324405.
The design, fabrication, and performance of miniature high-frequency annular arrays are described. A 50-MHz, 2-mm-diameter, 7-element, equal-area annular array was fabricated and tested. The array elements were defined using photolithography and the electrical contacts were made using ultrasonic wire bonding. The resulting transducer produced pulses with a -6 dB bandwidth of 52% and an insertion loss of -16 dB. A radiation pattern was collected by scanning the transducer array above the tip of a glass fiber. A -6 dB two-way beam width of 75 microns was found at f/2. The radiation pattern decreased smoothly to less than -60 dB at a distance of 550 microns.
描述了微型高频环形阵列的设计、制造和性能。制作并测试了一个50兆赫、直径2毫米、7个元件、等面积的环形阵列。阵列元件通过光刻定义,电接触通过超声引线键合实现。所得换能器产生的脉冲-6分贝带宽为52%,插入损耗为-16分贝。通过在玻璃纤维尖端上方扫描换能器阵列收集辐射方向图。在f/2时发现-6分贝双向波束宽度为75微米。在550微米的距离处,辐射方向图平滑下降至低于-60分贝。