Marot L, De Temmerman G, Oelhafen P, Covarel G, Litnovsky A
Department of Physics, University of Basel, Klingelbergstrasse 82, CH-4056 Basel, Switzerland.
Rev Sci Instrum. 2007 Oct;78(10):103507. doi: 10.1063/1.2800779.
Metallic mirrors will be essential components of all optical spectroscopy and imaging systems for ITER plasma diagnostics. Any change in the mirror performance, in particular, its reflectivity, due to erosion of the surface by charge exchange neutrals or deposition of impurities will influence the quality and reliability of the detected signals. Due to its high reflectivity in the visible wavelength range and its low sputtering yield, rhodium appears as an attractive material for first mirrors in ITER. However, the very high price of the raw material calls for using it in the form of a film deposited onto metallic substrates. The development of a reliable technique for the preparation of high reflectivity rhodium films is therefore of the highest importance. Rhodium layers with thicknesses of up to 2 microm were produced on different substrates of interest (Mo, stainless steel, Cu) by magnetron sputtering. Produced films exhibit a low roughness and crystallite size of about 10 nm with a dense columnar structure. No impurities were detected on the surface after deposition. Scratch tests demonstrate that adhesion properties increase with substrate hardness. Detailed optical characterizations of Rh-coated mirrors as well as results of erosion tests performed both under laboratory conditions and in the TEXTOR tokamak are presented in this paper.
金属镜将是ITER等离子体诊断所有光学光谱和成像系统的关键部件。由于电荷交换中性粒子对表面的侵蚀或杂质的沉积，镜子性能的任何变化，特别是其反射率的变化，都会影响检测信号的质量和可靠性。由于铑在可见波长范围内具有高反射率且溅射产率低，因此它似乎是ITER中第一反射镜的理想材料。然而，原材料的高昂价格要求以薄膜形式沉积在金属基板上使用。因此，开发一种制备高反射率铑膜的可靠技术至关重要。通过磁控溅射在不同的感兴趣基板（钼、不锈钢、铜）上制备了厚度达2微米的铑层。制备的薄膜具有低粗糙度和约10纳米的微晶尺寸，呈致密柱状结构。沉积后表面未检测到杂质。划痕试验表明，附着力随基板硬度的增加而提高。本文介绍了镀铑镜的详细光学特性以及在实验室条件下和TEXTOR托卡马克中进行的侵蚀试验结果。
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