Dong Fengliang, Zhang Qingchuan, Chen Dapeng, Miao Zhengyu, Xiong Zhiming, Guo Zheying, Li Chaobo, Jiao Binbin, Wu Xiaoping
CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei, Anhui 230027, China.
Ultramicroscopy. 2008 May;108(6):579-88. doi: 10.1016/j.ultramic.2007.08.014. Epub 2007 Oct 22.
It is a major issue to improve the thermo-mechanical sensitivity of uncooled optomechanical focal plane arrays (FPAs) for infrared imaging. This work presents an optimized multi-fold interval metallized leg (IML) configuration to increase the thermo-mechanical sensitivity of an uncooled optomechanical bi-material micro-cantilever array. The inclination angle changes of the cantilever elements are measured in the IR imaging system using an optical readout with a knife-edge filtering operation in the spectrum plane. The multi-fold IML configuration consists of alternately connected unmetallized and metallized legs. With the optimized fold number, the thermo-mechanical sensitivity of a micro-cantilever array can be amplified to two times of one-fold IML for a 120 microm x 120 microm element with 1 microm thick SiNx/0.2 microm thick Au films. Room temperature objects are imaged with the fabricated FPA containing 160 x 160 elements and a 12-bit CCD. Further modeling analysis shows that the experimental results are well accordant with the theoretical calculation. An important practical feature of the implemented approach is its straightforward fabrication for a large FPA, without growing complexity and cost.
提高非制冷光机焦平面阵列（FPA）用于红外成像的热机械灵敏度是一个主要问题。这项工作提出了一种优化的多折间隔金属化腿（IML）结构，以提高非制冷光机双材料微悬臂梁阵列的热机械灵敏度。在红外成像系统中，使用光谱平面上的刀口滤波操作进行光学读出，测量悬臂元件的倾斜角变化。多折IML结构由交替连接的未金属化和金属化腿组成。通过优化折叠数，对于具有1μm厚SiNx/0.2μm厚Au膜的120μm×120μm元件，微悬臂梁阵列的热机械灵敏度可以放大到单折IML的两倍。使用包含160×160个元件的制造的FPA和12位CCD对室温物体进行成像。进一步的建模分析表明，实验结果与理论计算结果吻合良好。所采用方法的一个重要实际特点是其对于大型FPA的直接制造，而不会增加复杂性和成本。
