Choi Inhee, Kang Sung Koo, Lee Jeongjin, Kim Younghun, Yi Jongheop
School of Chemical and Biological Engineering, Institute of Chemical Processes, Seoul National University, Seoul 151-742, Korea.
J Nanosci Nanotechnol. 2007 Nov;7(11):4161-4.
A type of 2-dimensional planar pattern with spatial resolution can be easily produced using scanning probe lithography (SPL). However, it has not been used successfully for fabricating 3-dimensional (3D) structures due to the low aspect ratio of the resulting structure. Herein, we describe a method for fabricating a 3D functionalized structure via a combination of SPL and self-assembly techniques. In this study, a 3D structure was established on a Si surface with a passivated monolayer via SPL. The patterned layer was modified using a omega-functionalized organosilane. Lateral force microscopy (LFM) was applied to discriminate the chemical functionalities and gold nanoparticles were also used to clearly identify the modified layer.
使用扫描探针光刻技术（SPL）可以轻松制作出一种具有空间分辨率的二维平面图案。然而，由于所得结构的纵横比低，它尚未成功用于制造三维（3D）结构。在此，我们描述了一种通过结合SPL和自组装技术制造3D功能化结构的方法。在本研究中，通过SPL在具有钝化单层的Si表面上建立了3D结构。使用ω-功能化有机硅烷对图案化层进行修饰。应用侧向力显微镜（LFM）来区分化学官能团，还使用金纳米颗粒来清晰识别修饰层。
