Lányi S
Institute of Physics, Slovakian Academy of Sciences, Dúbravská cesta 9, Bratislava, Slovakia.
Ultramicroscopy. 2008 Jul;108(8):712-7. doi: 10.1016/j.ultramic.2007.11.002. Epub 2007 Nov 13.
The capacitance of approximately conical scanning capacitance microscope probes placed perpendicularly over a conducting plane has been modelled using the finite element method. The dependence on tip/surface distance, radius of curvature of the tip apex, cone angle and height has been analysed. Both shielded and unshielded probes have been considered. The fits of obtained dependences have been combined into an analytic approximation of the capacitance as a function of tip/surface distance, radius of curvature, cone angle and height. The results can be used to estimation of stray capacitance, achievable lateral resolution and contrast.
使用有限元方法对垂直放置在导电平面上的近似圆锥形扫描电容显微镜探针的电容进行了建模。分析了其对针尖/表面距离、针尖顶点曲率半径、锥角和高度的依赖性。同时考虑了屏蔽和非屏蔽探针。将获得的依赖性拟合结果合并为电容作为针尖/表面距离、曲率半径、锥角和高度的函数的解析近似。这些结果可用于估计杂散电容、可实现的横向分辨率和对比度。
